Probe control
Coarse thumb-screw motion; fine piezoelectric motion
Coarse Movement Range, X axis
>1000 µm
Coarse Movement Range, Y/Z axes
500–1000 µm
Fine Movement Range, X axis
2–3 µm
Fine Movement Range, Y/Z axes
~40 µm
Electrical Contacts
2 standard; 3–7 optional
Electrical Measurement/Control
Integrated voltage source meter
Current Resolution
Down to 1 pA (depending on the choice of electronics)
Sample Compatibility
3 mm half grids; FIB lift-out grids; custom