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TEM MEMS Heating + Biasing Sample Holder

Operando heating, biasing under environmental conditions

Technical Specs
1550 Series Single-Tilt
1550 Series Double-Tilt
Tilt Range
Up to ± 45° depending on objective pole
<0.01 degree
Beta Tilt Accuracy
N/A
Up to ±30° α and ±20° β depending on objective pole
Electrical Contacts
9 contacts
9 contacts
Contact Type
Direct chip contact
Direct chip contact
Max Operating Temperature
>1000 °C
>1000 °C
Settled Resolution at 1000°C
Up to TEM resolution
Up to TEM resolution
Temperature Stability
100+ hours
100+ hours
Temperature Measurement
4-point resistive sensing
4-point resistive sensing
Special Cabling & Biasing Options
High-voltage or high-frequency biasing options
High-voltage or high-frequency biasing options
EELS / EDS Compatible
Yes
Yes
Instrument Type
TEM
TEM

Available For:

Correlate nanoscale structural, chemical, and electrical changes with simultaneous closed-loop heating and electrical biasing during in-situ TEM experiments

Key Features and Capabilities

Multimodal Characterization

Correlate heating, electrical biasing, and imaging data across TEM, SEM, and X-ray microscopy platforms

High-Voltage Biasing

Optional add on
Extend electrical characterization capabilities with specialized biasing hardware and chip configurations for up to 1 kV electrical biasing

60+ In-Stock TEM Heating and Biasing Chip Configurations

Keep experiments moving with in-stock MEMS chips for heating, electrical biasing, and advanced in-situ TEM characterization

High-Accuracy and Repeatable Double Tilt

Optimize sample orientation for atomic resolution, zone axis orientation, diffraction, crystallography, and analytical TEM workflows using the double-tilt holder configuration

Closed-Loop MEMS Heating Above 1000 °C

Achieve stable high-temperature experiments with rapid MEMS heating and precise temperature control alongside concurrent biasing

Nine Low-Noise Electrical Contacts

Perform low-noise in-situ electrical measurements with nine direct chip electrical contacts and individually shielded coaxial cables

Screw-Free Direct Chip Insertion

Load MEMS chips quickly with reliable electrical contact and simplified experiment setup

How it works

The TEM MEMS Heating + Biasing Sample Holder combines Hummingbird Scientific's in-house microfabricated MEMS chips, direct electrical contacts, and closed-loop temperature control to create a stable platform for simultaneous in-situ heating and electrical biasing inside the TEM. Samples are mounted directly onto a MEMS chip and inserted into the holder using a screw-free loading mechanism, enabling fast, reproducible experiment setup.

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During operation, the MEMS microheater delivers temperatures up to above 1000 °C, while on-chip 4-point resistance sensing enables closed-loop temperature control for stable real-time imaging and analysis. Heating + Biasing MEMS chips support simultaneous thermal and electrical stimulation, while biasing MEMS chips dedicate all nine contacts to electrical measurements when heating is not required.

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The double-tilt configuration adds high-accuracy beta tilt controlled by dedicated tilting software, enabling precise sample orientation for diffraction, crystallographic, and analytical in-situ TEM experiments.