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The SEM High-Pressure Gas Heating Sample Holder integrates a high-pressure-rated environmental cell, high-pressure gas delivery hardware, multifunctional high-pressure MEMS chips, electrical biasing, and closed-loop MEMS heating up to 900 °C into a unified platform for high-pressure in-situ SEM experiments. Samples are mounted onto Hummingbird Scientific MEMS chips optimized for pressures up to 20 bar before the environmental cell is assembled using a specialized high-pressure sealing mechanism. High-pressure-resistant, low-bowing silicon nitride (SiN) membranes, combined with optimized spacer geometries, maintain stable electron-transparent windows while withstanding gas pressures up to 20 bar.
The high-pressure gas delivery system provides manually-controlled gas flow through the sealed environmental cell, while the low-thermal-mass MEMS microheater enables rapid, closed-loop heating with integrated four-point on-chip temperature sensing. Compatible MEMS chips support a wide range of high-pressure in-situ gas-phase experiments, enabling direct observation of pressure- and temperature-dependent surface reactions, catalyst restructuring, oxidation, reduction, sintering, phase transformations, and material degradation under industry-relevant gas environments.