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SEM MEMS Heating + Biasing Sample Holder

Operando heating, biasing under environmental conditions

Technical Specs
1590 Series – SEM
Electrical Contacts
9
Contact Type
Direct chip contact
Max Operating Temperature
>1000 °C
Settled Resolution at 1000 °C
Up to SEM resolution
Temperature Stability
100+ hours
Temperature Measurement
4-point resistance sensing
Special Cabling and Sample Carriers
High-voltage or high-frequency biasing options
EDS Compatible
Yes
SEM Compatibility
Custom integration
Instrument Type
SEM

Available For:

Correlate surface morphology, chemical, and electrical changes with simultaneous closed-loop MEMS heating and electrical biasing during in-situ SEM experiments

Key Features and Capabilities

60+ In-Stock SEM Heating and Biasing Chip Configurations

Keep experiments moving with in-stock MEMS chips for heating, electrical biasing, and advanced in-situ SEM characterization

Screw-Free Direct Chip Insertion

Load MEMS chips quickly with reliable electrical contact and simplified experiment setup

Multimodal Characterization

Correlate heating, electrical biasing, and imaging data across TEM, SEM, and X-ray microscopy platforms

Nine Low-Noise Electrical Contacts

Perform low-noise in-situ electrical measurements with nine direct chip electrical contacts and individually shielded coaxial cables

Closed-Loop MEMS Heating Above 1000 °C

Achieve stable high-temperature experiments with rapid MEMS heating and precise temperature control alongside concurrent biasing

How it works

The SEM MEMS Heating + Biasing Sample Holder combines Hummingbird Scientific's in-house microfabricated MEMS chips, direct electrical contacts, and closed-loop temperature control to perform simultaneous high-temperature heating and electrical biasing inside the SEM. Samples are mounted directly onto a MEMS chip and inserted into the holder using a screw-free loading mechanism, enabling fast, reproducible experiment setup.

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During operation, the MEMS microheater delivers temperatures up to above 1000 °C, while on-chip 4-point resistance sensing enables closed-loop temperature control for stable real-time imaging and analysis. Heating + Biasing MEMS chips support simultaneous thermal and electrical stimulation, while biasing MEMS chips dedicate all nine contacts to electrical measurements when heating is not required.

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EDS-compatible SEM analysis allows researchers to correlate morphology, elemental information, temperature, and electrical stimulus during the experiment.