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TEM Gas Plasma Sample Holder

Operando heating, biasing under environmental conditions

Technical Specs
1300 Series Plasma/Gas
Pressure Range at Sample
Top to bottom plasma
Plasma Geometry
up to 1kV
Plasma Voltage Range
Yes
Holder Gas Inlets/Outlets
1 inlet and 1 outlet on the holder
Gas Controller Configuration
1 experimental gas and 1 inert purge gas
Purge Capability
Yes
Biasing Contacts
4 contacts
EELS / EDS Compatible
Yes
Instrument Type
TEM

Available For:

Investigate plasma-assisted catalysis, surface modification, and materials processing using operando plasma generation and atomic-resolution in-situ TEM imaging

Key Features and Capabilities

Purgeable 1+1 Channel Gas Delivery System

Control gas pressure from high vacuum to 2 bar using one experimental gas and a dedicated purge line for reliable, repeatable gas-phase and operando plasma TEM experiments

60+ In-Stock Plasma-Gas-Cell TEM Chip Configurations

Optional add on
Keep experiments moving with in-stock plasma-gas-cell TEM chips designed for operando plasma, gas flow, heating, sample biasing, and multimodal microscopy workflows

Optimized for EELS and EDS

Perform correlative spectroscopy and microscopy for detailed in-situ elemental analysis

TEM Safety & Seal Verification

Protect your TEM during plasma-gas-cell experiments and streamline setup with rapid high-vacuum seal checking and optical inspection

Integrated Gas Heating

Optional add on
Perform temperature-controlled gas-phase TEM with homogeneous MEMS heating above 1000 °C, 4-point on-chip temperature sensing, and near-drift-free imaging

Operando Plasma Generation

Generate stable low-temperature plasma directly adjacent to the specimen for real-time studies of plasma–material interactions

Reproducible Screw-Free Plasma-Gas-Cell Assembly

Achieve reproducible plasma-gas-cell assembly with self-aligning windows and a screw-free sealing design

How it works

The TEM Plasma Gas Sample Holder integrates a sealed environmental cell, dedicated gas delivery, cathode–anode microfabricated MEMS chips, MEMS heating, high voltage electrical connections and safety features, and dedicated control hardware into a unified platform for operando plasma TEM experiments. The environmental cell is formed by a cathode chip and an anode chip separated by precision spacers, creating a controlled gas environment around the specimen that remains isolated from the microscope vacuum. When a voltage is applied between the electrodes, plasma is generated directly within the environmental cell adjacent to the electron-transparent imaging region, enabling real-time observation of plasma–material interactions at atomic resolution.

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Controlled gas flow is delivered through the environmental cell at pressures up to 2 bar, while up to 1 kV electrical bias can be applied to sustain internal plasma between patterned electrodes with optimized geometries. This integrated platform enables researchers to directly correlate plasma exposure with structural, chemical, and functional evolution during plasma-assisted gas–solid reactions, catalyst activation, surface modification, and other plasma-assisted materials processes.