Nature Communications
The TEM Plasma Gas Sample Holder enables operando plasma generation inside the transmission electron microscope, allowing plasma–material interactions to be investigated with atomic-resolution TEM and STEM imaging. A sealed environmental cell combines controlled gas flow, plasma generation, and high-voltage electrical biasing within a single experimental platform, enabling researchers to recreate plasma processing environments while performing real-time imaging and analytical characterization.
Designed for researchers in materials science, catalysis, semiconductor manufacturing, nanotechnology, energy conversion, and surface engineering, the holder supports investigations of plasma-assisted catalysis, surface modification, thin-film deposition and etching, defect engineering, nanoparticle growth, oxidation, reduction, and plasma-induced phase transformations. The platform enables direct observation of structural and chemical evolution during plasma processing under well-defined experimental conditions.
Many plasma-assisted processes are governed by short-lived reactive species and non-equilibrium reaction pathways that cannot be captured using conventional ex-situ characterization. By observing materials during plasma exposure, researchers can directly correlate structural evolution with the applied plasma environment to understand reaction mechanisms, optimize processing conditions, and accelerate the development of catalysts, semiconductor devices, coatings, and other advanced functional materials.

The TEM Plasma Gas Sample Holder integrates a sealed environmental cell, dedicated gas delivery, cathode–anode microfabricated MEMS chips, MEMS heating, high voltage electrical connections and safety features, and dedicated control hardware into a unified platform for operando plasma TEM experiments. The environmental cell is formed by a cathode chip and an anode chip separated by precision spacers, creating a controlled gas environment around the specimen that remains isolated from the microscope vacuum. When a voltage is applied between the electrodes, plasma is generated directly within the environmental cell adjacent to the electron-transparent imaging region, enabling real-time observation of plasma–material interactions at atomic resolution.
Controlled gas flow is delivered through the environmental cell at pressures up to 2 bar, while up to 1 kV electrical bias can be applied to sustain internal plasma between patterned electrodes with optimized geometries. This integrated platform enables researchers to directly correlate plasma exposure with structural, chemical, and functional evolution during plasma-assisted gas–solid reactions, catalyst activation, surface modification, and other plasma-assisted materials processes.


Achieve reproducible plasma-gas-cell assembly with self-aligning windows and a screw-free sealing design

Load plasma-gas-cell TEM chips and samples in minutes using our industry-leading ease-of-use constant-compression tip sealing mechanism. The tight-tolerance chips fit perfectly into the precision-machined tip, repeatably self-aligning the SiN viewing membranes and evenly compressing the O-rings without relying on finicky screws or alignment jigs. The precision-machined holder tip delivers consistent gas-cell assembly, reducing setup complexity while improving experiment-to-experiment reproducibility and imaging reliability.

Generate stable low-temperature plasma directly adjacent to the specimen for real-time studies of plasma–material interactions

A dedicated cathode–anode MEMS chip architecture generates plasma within the sealed environmental cell directly adjacent to the electron-transparent imaging region. By combining controlled gas flow with localized plasma generation, the holder enables direct observation of plasma-assisted gas–solid reactions, catalyst activation, surface modification, defect formation, thin-film processing, and other plasma-induced materials transformations while maintaining atomic-resolution TEM and STEM imaging.

Control gas pressure from high vacuum to 2 bar using one experimental gas and a dedicated purge line for reliable, repeatable gas-phase and operando plasma TEM experiments

The Purgeable 1+1 Channel Gas Delivery System provides precise, software-controlled delivery of one experimental gas over a pressure range from high vacuum (10⁻⁶ mbar) to 2 bar. A dedicated inert-gas purge line enables rapid switching between reaction gases, supporting sequential oxidation, reduction, and other gas–solid reaction studies while minimizing cross-contamination and ensuring reproducible experiments.

Protect your TEM during plasma-gas-cell experiments and streamline setup with rapid high-vacuum seal checking and optical inspection

Reliable in-situ operando plasma and gas flow experiments begin well before the holder enters the microscope. Hummingbird Scientific's integrated pumping and seal-checking system helps researchers verify plasma-gas-cell integrity, reduce contamination risk, and protect microscope vacuum performance.

Perform correlative spectroscopy and microscopy for detailed in-situ elemental analysis

The TEM Gas Plasma Sample Holder supports both EDS and EELS, enabling researchers to correlate in-situ gas-phase imaging with real-time chemical and elemental analysis. Optimized environmental cell and microfabricated chip geometries maximize X-ray collection efficiency, while low-bowing membranes and small spacers help reduce gas scattering and maintain sample stability suitable for EELS acquisition.

Perform temperature-controlled gas-phase TEM with homogeneous MEMS heating above 1000 °C, 4-point on-chip temperature sensing, and near-drift-free imaging

Achieve homogeneous heating above 1000 °C during in-situ operando plasma TEM experiments with MEMS microheaters and integrated 4-point on-chip temperature sensing for accurate closed-loop temperature control. Localized heating minimizes thermal load, enabling stable, near-drift-free imaging throughout the operational temperature range for dynamic in-situ gas–solid reaction experiments.

Keep experiments moving with in-stock plasma-gas-cell TEM chips designed for operando plasma, gas flow, heating, sample biasing, and multimodal microscopy workflows

Hummingbird Scientific manufactures plasma-gas-cell TEM chips in our in-house microfabrication and inspection facility and maintains more than 60 standard configurations in stock for rapid delivery. Designed for in-situ TEM operando plasma, gas-flow, heating, and biasing experiments, these chips are ready-to-use out of the box and require no additional cleaning before use. This means your experiments will not get held up by long lead times for substrates. Multiple spacer, window, and heater geometries as well as material options support applications including corrosion studies, phase transformations, and catalysis, with made-to-order custom chips available for specialized experiments.

a) Operando sequential images of nanoparticles treated by He + 0.5 % H2 plasma (56 mW). b) EDX-mapped images and corresponding 1-D profiles of net signals of untreated and treated nanoparticles by He + 0.5 % H2 plasma. c) High-resolution TEM images of untreated and treated nanoparticles by He + 0.5 % H2 plasma. d) Statistics of integrated net intensity ratios of untreated and treated nanoparticles measured from at least 10 particles foreach case. e) Statistics of particle sizes of untreated and treated nanoparticles. Scale bars denote 50 nm.
Operando plasma TEM imaging of hydrogen-plasma reduction in Fe₃O₄ nanoparticles
The Hummingbird Scientific TEM Gas Plasma sample holder was used to perform operando transmission electron microscopy of magnetite (Fe3O4) nanoparticles during exposure to non-thermal hydrogen plasma. By integrating a custom atmospheric-pressure plasma cell into the holder, the researchers imaged nanoscale plasma–material interactions in real-time with ~1 nm spatial resolution. The platform enabled direct observation of particle shrinkage, crack formation, and reduction kinetics during plasma treatment. Correlative TEM and EDX analysis revealed that hydrogen radicals generated within the plasma rapidly reduced iron oxide at temperatures substantially below conventional thermal reduction conditions, providing direct mechanistic insight into plasma-assisted materials processing.
Reference: Jae Hyun Nam, et al. Nature Communications (2025). DOI:10.1038/s41467-025-62639-4
Copyright © 2025 The Author(s). Nature Communications published by Springer Nature. Open Access.
Spend less time managing equipment and more time generating results. Hummingbird Connect™ integrates with microscope and laboratory software platforms to simplify experiment setup, streamline workflows, and keep your data organized from acquisition through analysis.
To help you get the most from your gas-cell holder, Hummingbird Control™ Software provides intuitive and precise control of closed loop gas heating. Together, these software solutions enable faster setup, improved reproducibility, and more efficient gas-phase TEM experiments.
Hummingbird Scientific designs, machines, assembles, tests, and services its products in-house. Our integrated engineering, machining, microfabrication, and applications teams enable rapid prototyping and iteration, custom modifications, and direct technical support throughout the life of the instrument. This vertically integrated approach allows researchers to adapt experimental platforms to unique scientific requirements while maintaining the performance and reliability required for advanced in-situ microscopy experiments.
The TEM Plasma Gas Sample Holder is a direct result of these capabilities, integrating operando plasma generation, controlled gas delivery, MEMS heating, electrical biasing, and experimental workflows into a single platform for reproducible in-situ plasma TEM experiments.
Need something unique? Our engineers can customize existing products or develop entirely new solutions to support specialized experiments and emerging research challenges.
The TEM Plasma Gas Sample Holder is an in-situ transmission electron microscopy (TEM) sample holder that uses microfabricated cathode and anode MEMS chips to generate plasma directly within a sealed environmental cell inside the microscope. The plasma is created adjacent to the electron-transparent imaging region, enabling real-time, atomic-resolution TEM and STEM imaging of plasma–material interactions under controlled gaseous environments. The platform supports controlled gas flow up to 2 bar, closed-loop MEMS heating beyond 1000 °C, and electrical biasing, allowing researchers to investigate plasma-assisted catalysis, surface modification, plasma-enhanced materials processing, and other dynamic plasma-induced material transformations while simultaneously performing high-resolution imaging and analytical characterization.
The TEM Plasma Gas Sample Holder supports a wide range of operando plasma TEM experiments, including plasma-assisted catalysis, plasma-enhanced surface modification, thin-film deposition and etching, defect engineering, oxidation and reduction reactions, nanoparticle synthesis and growth, plasma cleaning, semiconductor processing, and plasma-induced phase transformations. Compatible microfabricated MEMS chips further enable MEMS heating and electrical biasing, allowing researchers to directly correlate structural evolution with plasma, thermal, and electrical stimuli under controlled gas environments in real time.
The TEM Plasma Gas Sample Holder supports controlled gas flow over a wide pressure range, from high vacuum to 2 bar, through a standard 1+1 channel gas delivery configuration consisting of one experimental gas line and one dedicated purge gas line. Precision control of gas composition, flow, and pressure provides stable, reproducible plasma conditions for operando plasma TEM experiments, enabling controlled investigation of plasma–material interactions, plasma-assisted reactions, and plasma processing under well-defined experimental environments.
The TEM Plasma Gas Sample Holder features a precision-engineered, screw-free loading and sealing mechanism that enables fast, reproducible environmental cell assembly. During loading, the mechanism automatically aligns the electron-transparent silicon nitride (SiN) windows, precisely positions the cathode and anode MEMS chips, establishes on-chip electrical connections, and creates a sealed environmental cell without requiring manual window or electrode alignment. Precision spacers define the thickness of the plasma region adjacent to the imaging window, ensuring consistent plasma generation and reproducible experimental conditions. This engineered architecture reduces setup time, minimizes user variability, and delivers reliable, repeatable performance for operando plasma TEM experiments.
Yes. The TEM Plasma Gas Sample Holder supports both EDS and EELS during operando plasma TEM experiments. Its environmental cell and microfabricated MEMS chip architecture are optimized to maximize X-ray collection efficiency, while precision spacers maintain a controlled gas-layer thickness to minimize electron scattering and preserve specimen stability required for high-quality EELS acquisition. These capabilities enable researchers to directly correlate plasma-induced structural evolution with real-time elemental composition and chemical changes during plasma–material interactions and plasma-assisted materials processing.
The TEM Plasma Gas Sample Holder is compatible with a wide range of research gases, including 100% hydrogen (H₂), 100% oxygen (O₂), and other non-corrosive gases commonly used for plasma-assisted catalysis, surface modification, plasma cleaning, oxidation, reduction, semiconductor processing, and environmental TEM studies. The gas delivery system is designed to provide stable, reproducible gas flow for reliable plasma generation during in-situ experiments. Use of hazardous, toxic, or flammable gases should be coordinated with your microscope facility management and may require dedicated exhaust or outlet gas venting to comply with local laboratory safety requirements.


