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In-Situ TEM reveals local temperature measurement in nano-scale electrical devices

February 17, 2015

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Temperature changes in electronic devices can have a detrimental effect on device reliability. Researchers from the University of California, Los Angeles, the University of Southern California and Lawrence Berkeley National Laboratory have used a Hummingbird Scientific in-situ TEM electrical biasing holder to develop a new method to measure local temperature in electronic devices. They use the plasmon energy in the electron energy loss spectrum to measure the temperature at the nano-scale. This method could aid in the development of future faster and more reliable electronic devices.

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A false-color temperature map of a 80-nm-thick, 100-nm-wide serpentine aluminum wire Joule-heated in-situ in the TEM using low-loss EELS measurements. Image Copyright © 2015, American Association for the Advancement of Science.
In-Situ TEM reveals local temperature measurement in nano-scale electrical devices

Figure: This shows the scale from the Hummingbird Scientific Biasing holder to the temperature map. Image courtesy of USC CEMMA and UCLA Regan Group collaboration.

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Learn more about the Electrical Biasing Sample Holder used in the experiment

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UCLA Science Paper PR

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Reference:

M. Mecklenburg, W. A. Hubbard,E. R. White, Rohan Dhall, S. B. Cronin, S. Aloni, and B. C. Regan “Nanoscale temperature mapping in operating microelectronic devices “, Science vol. 347 iss. 6222, (2015) pp. 629-632.

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Copyright © 2015, American Association for the Advancement of Science.

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