ECS Meeting Abstracts
Micron
Microscopy and Microanalysis
Microscopy and Microanalysis
The SEM Liquid Flow Sample Holder enables in-situ liquid-phase SEM imaging of dynamic processes in controlled liquid environments. An enclosed microfluidic flow cell with electron-transparent silicon nitride (SiN) windows isolates the liquid-phase sample from the microscope vacuum while supporting static or continuous flow. A precision-engineered, screw-free loading and compression-sealing mechanism ensures reproducible liquid cell assembly and self-alignment of the imaging windows. The holder supports microfabricated chips for MEMS heating, electrical biasing, and liquid electrochemistry, with an optional dual-inlet flow configuration for in-situ reagent mixing.
Designed for researchers in materials science, chemistry, energy storage, catalysis, environmental science, and life sciences, the platform enables direct observation of nanoparticle nucleation and growth, crystallization, corrosion, electrochemical reactions, and solid–liquid and liquid–liquid interfacial processes in liquid environments that cannot be captured using conventional ex-situ characterization.
Continuous liquid flow, rapid solution exchange, and optional dual-inlet mixing enable real-time observation of reactions from their earliest stages. The holder is optimized for versatility in SEM environments with multiple unique detectors including scattered (BSE and SE) and transmission (STEM) oriented around the sample stage inside of an evacuated chamber. Combined with MEMS heating, electrical biasing, and liquid electrochemistry chips, the holder allows correlation of structural evolution with thermal, electrical, and electrochemical responses to reveal the mechanisms governing material transformation, interfacial reactions, and device behavior under realistic liquid conditions.

The SEM Liquid Flow Sample Holder uses an enclosed microfluidic liquid cell to maintain a controlled liquid environment inside the high vacuum of the SEM. The liquid cell is formed by two silicon microchips with electron-transparent silicon nitride (SiN) windows that encapsulate a thin liquid layer while allowing the electron beam to image dynamic processes in liquid environments.
A precision-engineered, screw-free chip loading and compression-sealing mechanism ensures reproducible liquid cell assembly and self-alignment of the imaging windows for consistent experimental performance. The holder is compatible with specialized microfabricated chips for MEMS heating, electrical biasing, and liquid electrochemistry, enabling multiple in-situ techniques on the same liquid-flow platform.
Liquid is delivered to the holder tip through replaceable flexible microfluidic tubing. The standard configuration supports both static and continuous liquid flow, while an optional dual-inlet configuration enables two independent solutions to mix immediately before the imaging region. Continuous flow refreshes the liquid environment throughout the experiment, enabling reagent exchange, removal of reaction by-products, and real-time observation of dynamic liquid-phase processes.


Achieve reproducible liquid-cell assembly with self-aligning windows and a screw-free sealing design

Load liquid-cell SEM chips and solutions in minutes using our industry-leading ease-of-use constant-compression tip sealing mechanism. The tight-tolerance chips fit perfectly into the precision-machined tip, repeatably self-aligning the SiN viewing membranes and evenly compressing the O-rings without relying on finicky screws or alignment jigs. The precision-machined holder tip delivers consistent liquid-cell assembly, reducing setup complexity while improving experiment-to-experiment reproducibility and imaging reliability.

Simplify cleaning with removable and upgradeable holder tips that allow user access for full tubing replacement

Clean up after your experiment with ease so you can avoid cross-contamination. The Hummingbird Scientific SEM Liquid Flow sample holder features a removable tip, allowing access for tubing replacement, cross-compatibility with our TEM and X-ray Liquid Flow holders, and capability upgrades.

Image samples in continuous-flow or static liquid environments using a sealed microfluidic chip assembly

Perform in-situ liquid-phase SEM experiments under flowing or static liquid conditions while maintaining microscope safety, experimental flexibility, and reproducible imaging. The sealed microfluidic flow-cell architecture supports a wide range of electrochemistry, catalysis, synthesis, and materials characterization applications.

Correlate electrochemical, heating, and imaging data across SEM, TEM, and X-ray microscopy platforms

The SEM Liquid Flow Sample Holder features a user-removable liquid flow tip that can be transferred directly between compatible Hummingbird Scientific SEM, TEM, and X-ray microscopy liquid-phase platforms. By preserving the assembled liquid cell and sample, researchers can perform correlative in-situ characterization across multiple imaging modalities without rebuilding the experiment. This transferable tip architecture simplifies sample handling, improves experimental consistency, and enables direct correlation of structural, morphological, chemical, and functional information from the same region of interest across complementary microscopy techniques.

Perform correlative spectroscopy and microscopy for detailed in-situ elemental analysis

The SEM Liquid Flow sample holder is compatible with EDS detectors on SEM systems, enabling researchers to correlate applied conditions with real-time chemical and structural changes. Optimized liquid-cell geometries maximize X-ray collection efficiency.

Protect your SEM during liquid-cell experiments and streamline experimental workflows with rapid high-vacuum seal checking

Reliable in-situ liquid flow experiments begin well before the holder enters the microscope. Hummingbird Scientific's integrated pumping and seal-checking system helps researchers verify liquid-cell integrity, reduce contamination risk, and protect microscope vacuum performance.

Keep experiments moving with in-stock liquid-cell SEM chips designed for electrochemistry, liquid flow, heating, and multimodal microscopy workflows

Hummingbird Scientific manufactures liquid-cell SEM chips in our in-house microfabrication facility and maintains more than 60 standard configurations in stock for rapid delivery. Designed for in-situ SEM liquid-flow imaging, electrochemistry, and heating experiments, these chips are ready-to-use out of the box and require no additional cleaning. This means your experiments will not get held up by long lead times for substrates. Multiple spacer, window, heater, and electrode geometries as well as material options support applications including corrosion studies, battery research, and electrocatalysis, with made-to-order custom chips available for specialized experiments.

Add temperature-controlled liquid-phase SEM capabilities with homogeneous heating, precise temperature regulation, and near-drift-free in-situ imaging

The Integrated Liquid Heating system enables controlled thermal stimulation directly within the liquid cell for temperature-dependent in-situ SEM experiments. Microfabricated heating chips with calibrated sensors and closed-loop temperature control provide accurate, homogeneous heating up to the boiling point of your solution while maintaining stable imaging conditions.

Accelerate discovery with dual-flow liquid mixing for in-situ liquid phase SEM, capturing dynamic liquid-liquid reactions with greater control and flexibility

Optional dual-flow mixing configuration introduces two independent liquid streams into a single liquid-cell, enabling researchers to trigger reactions immediately before observation and capture transient processes as they occur.

Expand the capabilities of the SEM Liquid Flow Sample Holder with the BioLogic SP-200 potentiostat for quantitative in-situ TEM electrochemistry

Integrate the Biologic SP-200 Potentiostat with the SEM Liquid Flow Sample Holder to perform quantitative in-situ liquid electrochemistry during SEM imaging. The SP-200 provides precise potentiostatic and galvanostatic control for electrochemical experiments, enabling real-time correlation of electrochemical measurements with nanoscale structural evolution. Compatible with Hummingbird Scientific liquid electrochemistry chips, it supports a wide range of techniques including cyclic voltammetry, chronoamperometry, chronopotentiometry, and battery charge–discharge studies.

a) Schematic of LC-SEM setup with BSE, STEM, and EDX detectors. b) The electrons scattered from the liquid cell are collected in both forward and backward directions. The forward scattered electrons are collected by the STEM detector, and the backward scattered electrons are collected by the BSE detector. c) Cu2ONPs imaged with the different electron detectors: SE, BSE, and ADF-TE from left to right. The BSE and ADF-TE images were acquired with 0.1 M KHCO3 electrolyte inside the assembled liquid cell. Scale bar is 25 nm in the inset.
Dynamic multi-detector liquid-phase SEM imaging of nanoparticles in solution
The Hummingbird Scientific SEM Liquid Flow sample holder enabled direct imaging of copper oxide nanoparticles in a liquid environment using scanning electron microscopy. Researchers performed real-time imaging of nanoparticles suspended in varying thicknesses of solution using both backscattered and transmitted electron detection modes. The platform provided sufficient contrast and spatial resolution to visualize nanoparticles tens of nanometers in size through liquid layers several hundred nanometers thick and revealed a contrast inversion that can be used to directly measure liquid thickness. The study demonstrated excellent resolution and contrast conditions for liquid-phase SEM, enabling dynamic observation of nanoscale materials and processes while leveraging the flexibility and multi-detector capabilities of the SEM platform.
Reference: Aram Yoon, et al. Microscopy and Microanalysis (2021). DOI:10.1017/S1431927620024769
Copyright © Microscopy Society of America 2021. Published by Cambridge University Press.
Spend less time managing equipment and more time generating results. Hummingbird Connect integrates with microscope and laboratory software platforms to simplify experiment setup, streamline workflows, and keep your data organized from acquisition through analysis.
To help you get the most from your liquid-cell holder, Hummingbird Control Software provides intuitive and precise control of closed loop liquid heating. Together, these software solutions enable faster setup, improved reproducibility, and more efficient liquid-phase and electrochemical SEM experiments.
Hummingbird Scientific designs, machines, assembles, tests, and services its products in-house. Our integrated engineering, machining, microfabrication, software development, and applications teams enable rapid prototyping and iteration, custom modifications, and direct technical support throughout the life of the instrument. This vertically integrated approach allows researchers to adapt experimental platforms to unique scientific requirements while maintaining the performance and reliability required for advanced in-situ microscopy experiments.
The SEM Liquid Flow Sample Holder is a direct result of these capabilities, enabling reproducible in-situ liquid-phase imaging with optional MEMS heating, electrical biasing, electrochemistry, and dual-inlet liquid mixing on a single platform.
Need something unique? Our engineers can customize existing products or develop entirely new solutions to support specialized experiments and emerging research challenges.
The SEM Liquid Flow Sample Holder is an in-situ scanning electron microscopy (SEM) sample holder that uses microfabricated chips to create a sealed liquid cell inside the microscope, isolating the sample from the vacuum while maintaining a controlled liquid environment. It enables real-time liquid-phase SEM imaging under static or continuous liquid flow and supports compatible chips for MEMS heating, electrical biasing, and liquid electrochemistry to investigate dynamic processes in realistic liquid environments.
The SEM Liquid Flow Sample Holder supports a wide range of in-situ liquid-phase SEM experiments, including nanoparticle nucleation and growth, crystallization, corrosion, catalysis, electrochemical reactions, biomineralization, and solid–liquid or liquid–liquid interfacial studies. Compatible microfabricated chips further enable MEMS heating, electrical biasing, and liquid electrochemistry, allowing researchers to correlate structural evolution with thermal, electrical, and electrochemical stimuli in real time.
The SEM Liquid Flow Sample Holder supports both static and continuous-flow operation using its standard single-inlet configuration. An optional dual-inlet flow configuration allows two independent solutions to be introduced and mixed immediately before the imaging region, enabling controlled reagent mixing and real-time observation of reaction initiation. These configurations provide the flexibility to perform a wide range of in-situ liquid-phase SEM experiments, from long-term imaging of stable systems to dynamic studies of rapidly evolving processes.
Yes. The SEM Liquid Flow Sample Holder features a user-removable liquid-flow tip that can be transferred directly between Hummingbird Scientific's SEM, TEM, and X-ray microscopy liquid-phase platforms. This unique capability allows researchers to examine the same sample and liquid cell using complementary microscopy techniques without rebuilding the experiment, simplifying sample transfer and enabling direct correlation of morphological, structural, chemical, and functional information across multiple instruments.
The SEM Liquid Flow Sample Holder features a precision-engineered, screw-free chip loading and compression-sealing mechanism that enables fast, reproducible liquid-cell assembly. During loading, the mechanism automatically aligns the silicon nitride (SiN) imaging windows and establishes on-chip electrical connections with the holder, eliminating manual window and electrical contact alignment. This streamlined design ensures consistent liquid-cell geometry, reduces setup time, minimizes user variability, and delivers reliable, repeatable performance across experiments.
The SEM Liquid Flow Sample Holder is supplied with a microfluidic liquid delivery system for precise control of liquid flow during in-situ experiments. Both flow rate-controlled and pressure-controlled systems are available to accommodate different experimental requirements. Operation of the liquid delivery system is covered as part of the holder training.
The control software regulates and monitors experimental parameters such as temperature, liquid flow, biasing voltage, and current during in-situ SEM experiments. It enables precise control of experimental conditions while synchronizing parameter data with SEM image acquisition. Time-resolved logging of all experimental parameters allows researchers to directly correlate thermal, electrical, electrochemical, and fluidic conditions with real-time structural changes, providing a comprehensive dataset for accurate analysis and interpretation.
Yes. The SEM Liquid Flow Sample Holder supports energy-dispersive X-ray spectroscopy (EDS) during in-situ liquid-phase SEM experiments. Its EDS-optimized liquid cell design maximizes X-ray collection efficiency for reliable elemental analysis and mapping, allowing researchers to correlate real-time structural evolution with elemental composition during dynamic liquid-phase processes.

