Perform in-situ liquid-phase SEM with controlled microfluidic flow, integrated MEMS heating and biasing, and optional dual-inlet solution mixing to observe dynamic processes in real time

Enclosed Microfluidic Flow Cell for In-Situ SEM

The SEM Liquid Flow Sample Holder enables in-situ liquid-phase SEM imaging of dynamic processes in controlled liquid environments. An enclosed microfluidic flow cell with electron-transparent silicon nitride (SiN) windows isolates the liquid-phase sample from the microscope vacuum while supporting static or continuous flow. A precision-engineered, screw-free loading and compression-sealing mechanism ensures reproducible liquid cell assembly and self-alignment of the imaging windows. The holder supports microfabricated chips for MEMS heating, electrical biasing, and liquid electrochemistry, with an optional dual-inlet flow configuration for in-situ reagent mixing.

Built for Advanced Liquid-Phase SEM

Designed for researchers in materials science, chemistry, energy storage, catalysis, environmental science, and life sciences, the platform enables direct observation of nanoparticle nucleation and growth, crystallization, corrosion, electrochemical reactions, and solid–liquid and liquid–liquid interfacial processes in liquid environments that cannot be captured using conventional ex-situ characterization.

Reveal the Mechanisms Behind Material Behavior

Continuous liquid flow, rapid solution exchange, and optional dual-inlet mixing enable real-time observation of reactions from their earliest stages. The holder is optimized for versatility in SEM environments with multiple unique detectors including scattered (BSE and SE) and transmission (STEM) oriented around the sample stage inside of an evacuated chamber. Combined with MEMS heating, electrical biasing, and liquid electrochemistry chips, the holder allows correlation of structural evolution with thermal, electrical, and electrochemical responses to reveal the mechanisms governing material transformation, interfacial reactions, and device behavior under realistic liquid conditions.

SEM Liquid Flow Sample Holder

Hummingbird Advantages:

  • Features screw-free liquid-cell assembly with self-aligning windows for fast, reproducible sample loading.
  • Removable sample tip tip and fully user-replaceable tubing for easy cleaning and functional upgrades.
  • Maintain stable, nanometer resolution liquid-phase SEM imaging during extended in-situ experiments.
  • Correlate structural evolution with temperature, electrical biasing, or electrochemical measurements using compatible MEMS chips.
  • Use the same liquid-flow tip across Hummingbird Scientific SEM, TEM, and X-ray microscopy platforms for consistent workflows and straightforward correlative studies.
  • Support diverse applications including nanoparticle growth, crystallization, catalysis, corrosion, electrochemistry, biomineralization, and soft materials research.
Technical Specs
1400 Series SEM
Number of Inlets
1 or 2 depending on model, single outlet
Biasing Contacts
4 on-chip
Tubing Type
User-replaceable microfluidic tubing
Delivery System
Variable speed pressure or flow-controlled liquid delivery system
Tip Type
Removable tip
Flow Type
Continuous flow or static liquid
EDS Compatible
Yes
SEM Compatibility
Custom integration for most models

Available For:

How it Works

The SEM Liquid Flow Sample Holder uses an enclosed microfluidic liquid cell to maintain a controlled liquid environment inside the high vacuum of the SEM. The liquid cell is formed by two silicon microchips with electron-transparent silicon nitride (SiN) windows that encapsulate a thin liquid layer while allowing the electron beam to image dynamic processes in liquid environments.

A precision-engineered, screw-free chip loading and compression-sealing mechanism ensures reproducible liquid cell assembly and self-alignment of the imaging windows for consistent experimental performance. The holder is compatible with specialized microfabricated chips for MEMS heating, electrical biasing, and liquid electrochemistry, enabling multiple in-situ techniques on the same liquid-flow platform.

Liquid is delivered to the holder tip through replaceable flexible microfluidic tubing. The standard configuration supports both static and continuous liquid flow, while an optional dual-inlet configuration enables two independent solutions to mix immediately before the imaging region. Continuous flow refreshes the liquid environment throughout the experiment, enabling reagent exchange, removal of reaction by-products, and real-time observation of dynamic liquid-phase processes.

Key Features and Capabilities

Reproducible Screw-Free Liquid-Cell Assembly

Achieve reproducible liquid-cell assembly with self-aligning windows and a screw-free sealing design

Removable, Swappable Tip and Tubing

Simplify cleaning with removable and upgradeable holder tips that allow user access for full tubing replacement

Flexible Liquid Cell Operation

Image samples in continuous-flow or static liquid environments using a sealed microfluidic chip assembly

Multimodal Imaging

Correlate electrochemical, heating, and imaging data across SEM, TEM, and X-ray microscopy platforms

Optimized for EDS

Perform correlative spectroscopy and microscopy for detailed in-situ elemental analysis

SEM Safety & Seal Verification

Protect your SEM during liquid-cell experiments and streamline experimental workflows with rapid high-vacuum seal checking

60+ In-Stock Liquid-Cell SEM Chip Configurations

Keep experiments moving with in-stock liquid-cell SEM chips designed for electrochemistry, liquid flow, heating, and multimodal microscopy workflows

Optional add-on feature
Integrated Liquid Heating

Add temperature-controlled liquid-phase SEM capabilities with homogeneous heating, precise temperature regulation, and near-drift-free in-situ imaging

Optional add-on feature
Dual-Flow Liquid Mixing

Accelerate discovery with dual-flow liquid mixing for in-situ liquid phase SEM, capturing dynamic liquid-liquid reactions with greater control and flexibility

Optional add-on feature
Biologic SP-200 Potentiostat

Expand the capabilities of the SEM Liquid Flow Sample Holder with the BioLogic SP-200 potentiostat for quantitative in-situ TEM electrochemistry

Featured Research

Dynamic multi-detector liquid-phase SEM imaging of nanoparticles in solution

The Hummingbird Scientific SEM Liquid Flow sample holder enabled direct imaging of copper oxide nanoparticles in a liquid environment using scanning electron microscopy. Researchers performed real-time imaging of nanoparticles suspended in varying thicknesses of solution using both backscattered and transmitted electron detection modes. The platform provided sufficient contrast and spatial resolution to visualize nanoparticles tens of nanometers in size through liquid layers several hundred nanometers thick and revealed a contrast inversion that can be used to directly measure liquid thickness. The study demonstrated excellent resolution and contrast conditions for liquid-phase SEM, enabling dynamic observation of nanoscale materials and processes while leveraging the flexibility and multi-detector capabilities of the SEM platform.

Reference: Aram Yoon, et al. Microscopy and Microanalysis (2021). DOI:10.1017/S1431927620024769

Copyright © Microscopy Society of America 2021. Published by Cambridge University Press.

High Impact Publications

Explore research publications featuring the Hummingbird Scientific SEM Liquid Flow Sample Holder and discover how researchers are applying in-situ liquid-phase SEM to study dynamic processes in controlled liquid environments.

In-Situ Liquid-Electrochemical X-Ray and Electron Microscopy for Multi-Modal Energy Materials Characterization

Calvin Parkin, Tyler Mefford, Jongwoo Lim, Aram Yoon, Rui Serra-Maia, Pawan Kumar, See Wee Chee, William C. Chueh, Daan Hein Alsem, Norman Salmon, Eric A. Stach

ECS Meeting Abstracts

2024
New approach to electron microscopy imaging of gel nanocomposites in situ

Alejandra Londono-Calderon, Srikanth Nayak, Curtis L. Mosher, Surya K. Mallapragada, Tanya Prozorov

Micron

2019
Correlative Microbially-Assisted Imaging of Cellulose Deconstruction with Electron Microscopy

Alejandra Londono-Calderon, Wan Sun, Zengyi Shao, Daan Hein Alsem, Tanya Prozorov

Microscopy and Microanalysis

2018
Development of an Integrated Platform for Cross-Correlative Imaging of Biological Specimens in Liquid using Light and Electron Microscopies

D.A. Fischer, D.H. Alsem, B. Simon, T. Prozorov, N. Salmon

Microscopy and Microanalysis

2013

Software

Spend less time managing equipment and more time generating results. Hummingbird Connect integrates with microscope and laboratory software platforms to simplify experiment setup, streamline workflows, and keep your data organized from acquisition through analysis.

To help you get the most from your liquid-cell holder, Hummingbird Control Software provides intuitive and precise control of closed loop liquid heating. Together, these software solutions enable faster setup, improved reproducibility, and more efficient liquid-phase and electrochemical SEM experiments.

Built on Engineering Excellence

Hummingbird Scientific designs, machines, assembles, tests, and services its products in-house. Our integrated engineering, machining, microfabrication, software development, and applications teams enable rapid prototyping and iteration, custom modifications, and direct technical support throughout the life of the instrument. This vertically integrated approach allows researchers to adapt experimental platforms to unique scientific requirements while maintaining the performance and reliability required for advanced in-situ microscopy experiments.

The SEM Liquid Flow Sample Holder is a direct result of these capabilities, enabling reproducible in-situ liquid-phase imaging with optional MEMS heating, electrical biasing, electrochemistry, and dual-inlet liquid mixing on a single platform.

Need something unique? Our engineers can customize existing products or develop entirely new solutions to support specialized experiments and emerging research challenges.

Frequently Asked Questions

What is an SEM Liquid Flow Sample Holder?
What types of experiments can be performed with the SEM Liquid Flow Sample Holder?
What liquid flow configurations are available for the SEM Liquid Flow Sample Holder?
Is the SEM Liquid Flow Sample Holder compatible with multimodal imaging workflows?
How is the liquid cell assembled in the SEM Liquid Flow Sample Holder?
How is liquid flow controlled in the SEM Liquid Flow Sample Holder?
What does the software do during an in-situ SEM experiment?
Can EDS be performed during in-situ experiments using the SEM Liquid Flow Sample Holder?
SEM Liquid Flow
Technical Specs
1400 Series SEM
Number of Inlets
1 or 2 depending on model, single outlet
Biasing Contacts
4 on-chip
Tubing Type
User-replaceable microfluidic tubing
Delivery System
Variable speed pressure or flow-controlled liquid delivery system
Tip Type
Removable tip
Flow Type
Continuous flow or static liquid
EDS Compatible
Yes
SEM Compatibility
Custom integration for most models
Instrument Type
SEM

Available For:

Full Product Information
Product Specifications
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Biologic SP-200 Potentiostat
Dual-Flow Liquid Mixing
Integrated Liquid Heating